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U57系列減壓器

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GENTECU57seriessingle-stageregulatorsareaspringless,threadless,point-of-usetieddiaphragmdesignformodernsemiconductormanufacturers,equipmentmanufacturersandendusers

  GENTEC U57 series single-stage regulators are a springless, threadless, point-of-use tied diaphragm design for modern semiconductor manufacturers, equipment manufacturers and end users. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.

Features
  • 316L and Hastelloy® body
  • Metal to metal diaphragm to body seal
  • Easy front panel and rear bracket mounting
  • Gauge ports are standard with 1/4” face seal male. Internal 1/4” face seal female is also available
  • No springs or threads are exposed to the wetted area
  • Standard fully internal electropolished
  • Designed for very low particle generation
  • Cleaned, assembled and packaged for high purity semiconductor applications
  • High-cycle life
  • 99% Helium-leak tested
Materials of Construction
Wetted
Body 316L stainless steel, Hastelloy®
Seat PCTFE
Diaphragm Elgiloy®, Hastelloy®
Poppet 316L stainless steel
Compression Member 316L stainless steel
Remaining Part 316L stainless steel
Non-wetted
Nut 316 stainless steel
Cap nickel plated brass
Knob ABS Plastic
Operating Conditions
Maximum Inlet Pressure 300 psig (20 barg)
Outlet Pressure 0-30 psig (2 barg)
Temperature 0°F to 140°F (-18°C to 60°C)
Functional Performance
Flow Capacity Cv=0.054
Maximum Leak Rate:  
Inboard Leakage 0.5 x 10-9 atm cc/sec He
Outboard Leakage 1.0 x 10-9 atm cc/sec He
Across Seat Leakage 1.0 x 10-9 atm cc/sec He
Proof Pressure 150% of maximum rated pressure
Burst Pressure 400% of maximum rated pressure
Surface Finish
Standard Ra (EP) 10 μin
Optional Ra (EP) 5 μin
Internal Volume 9.3cc

 Dimensions
 Flow Charts

 

 
型號(hào)參數(shù)：
Series Body Ports Seat Inlet Pressure Outlet Pressure Gauge Inlet/Outlet Connections Options
U57 SL: 316L A: 2 port K: PCTFE G: 300psig L: 0-30psig P: with gauge 91: FSR(1/4"F) E: 5 μin
  H: Hastelloy® B: 3 port       W: without gauge 92: FSR(1/4"M) I: Internal 1/4" FSR(F) gauge ports
    G: 4 port         41: 1/4" tube weld stub T: Trim Hastelloy® internal
    J: 4 port            

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