銆€銆€銆�鍎€琛�缍�(w菐ng) 琛屾キ(y猫)妯�(bi膩o)婧�(zh菙n)銆戣繎鏃ワ紝鐢卞叏鍦�(gu贸)鍩庡競宸ユキ(y猫)鍝佽部(m脿o)鏄撲腑蹇冭伅(li谩n)鍚堟渻(hu矛)姝稿彛绠＄悊锛屾婕㈠弸缇庣鑷嫊(d貌ng)鍖栨湁闄愬叕鍙哥瓑鐩搁棞(gu膩n)鍠綅鍏卞悓璧疯崏鐨勩€婄瓑闆㈠瓙楂斿寲瀛�(xu茅)姘ｇ浉娌夌⿳鍏夌簴闋�(y霉)鍒舵鍒跺倷瑷�(sh猫)鍌欍€嬬法鍒跺畬鎴愬苟寰佹眰鎰忚锛屾檪(sh铆)闁撴埅姝㈠埌2023骞�5鏈�12鏃�銆�(鍙嶉鑷砨iaozhun@ceun.org)
 

銆€銆€鏈枃浠惰(gu墨)瀹氫簡绛夐洟瀛愰珨鍖栧(xu茅)姘ｇ浉娌夌⿳鍏夌簴闋�(y霉)鍒舵鍒跺倷瑷�(sh猫)鍌欑殑琛�(sh霉)瑾�(y菙)鍜屽畾缇�銆佽ō(sh猫)鍌欐(g貌u)鎴�銆佽姹�銆佺従(xi脿n)鍫�(ch菐ng)瑾�(di脿o)瑭�銆傛湰鏂囦欢閬╃敤浜庣瓑闆㈠瓙楂斿寲瀛�(xu茅)姘ｇ浉娌夌⿳鍏夌簴闋�(y霉)鍒舵鍒跺倷瑷�(sh猫)鍌欑殑鐢熺敘(ch菐n)鑸囨椹�(y脿n)銆�
 

銆€銆€瑷�(sh猫)鍌欐(g貌u)鎴愪富瑕佸寘鍚互涓嬮儴鍒�:PCVD娌夌⿳搴�;PCVD娴侀噺鏌�;鑷嫊(d貌ng)鎺у埗鑸囦繚璀�(h霉)绯荤当(t菕ng);PCVD鐔旂府搴�;鐭冲ⅷ鐖愮郴绲�(t菕ng);闋�(y霉)鐔辩垚;鐪熺┖绯荤当(t菕ng)銆�
 

銆€銆€鍚勭ó楣靛寲鐗㏒iCl₄銆丟eCl₄鐨勮捀姘ｅ拰O₂銆丆₂F₆銆丅CI₃绛夋埃楂旂殑娣峰悎鐗╁緸姘ｉ珨娴侀噺鎺у埗鏌�涓几鍑哄埌鐭宠嫳鐜荤拑鍙嶆噳(y墨ng)绠′腑锛岀煶鑻辩幓鐠冪鍙︿竴绔€ｆ帴鍒扮湡绌烘车锛屼娇鐭宠嫳鐜荤拑绠′腑鐨勬贩鍚堟埃楂旂董鎸佸湪1kPa宸﹀彸銆傜煶鑻辩幓鐠冪琚竴鍙噾灞鎸厰鐠�(hu谩n)绻�锛岄牷鐜囩偤2450MHz鐨勫井娉㈣兘閲忚几鍏ュ埌璜ф尟鑵斾腑锛屼娇鍙嶆噳(y墨ng)绠′腑鐨勫師鏂欐埃楂旈浕闆㈠舰鎴愮瓑闆㈠瓙楂斿苟鐢�(ch菐n)鐢熷寲瀛�(xu茅)鍙嶆噳(y墨ng)銆傝鎸厰娌跨煶鑻辩幓鐠冪蹇€熼亱(y霉n)鍕�(d貌ng)锛屽舰鎴愬帤搴﹀皬浜�1μm鐨勮杽鑶滐紝鍧囧嫽鍦版矇绌嶅湪绠″鍏�(n猫i)锛岀暥(d膩ng)閬�(d谩)鍒颁竴瀹氬帤搴︽檪(sh铆)锛屽皣鐜荤拑绠￠€�(j矛n)琛岀啍绺�锛屾敮鎾愬厜绾栭爯(y霉)鍒舵銆�
 

銆€銆€鎺у埗绯荤当(t菕ng)鎺у埗鍏�(n猫i)瀹瑰寘鎷�:
 

銆€銆€——涓绘帶绯荤当(t菕ng):鎳�(y墨ng)鑳借嚜鍕�(d貌ng)浠ユ洸绶氬湒褰㈠紡瑷橀寗鍚勫€�(g猫)娴侀噺鍊笺€佸钩绉�銆佹棆杞�(zhu菐n)鐨勯€熷害銆佹韩搴︾瓑;
 

銆€銆€——鍙嶆噳(y墨ng)鐗╂祦閲忔帶鍒剁郴绲�(t菕ng):鎳�(y墨ng)鑳介€氶亷(gu貌)娓�(c猫)閲忚級姘ｉ噺鍜岃級姘ｈ垏鍘熸枡姣旂巼锛屾帶鍒剁墿鏂欒捀姹芥祦閲�;
 

銆€銆€——鍙嶆噳(y墨ng)鐗╂枡鏂欐韩鎺у埗绯荤当(t菕ng):鎳�(y墨ng)瀵�(sh铆)鏅�(sh铆)鐩�(ji膩n)娓�(c猫)鐗╂枡婧害锛屽苟瀵�(sh铆)鏅�(sh铆)閫�(j矛n)琛屾韩搴﹁(di脿o)鏁�;
 

銆€銆€——寰尝鑵旈珨杓夎嚭(t谩i)骞崇Щ鎺у埗绯荤当(t菕ng):鎳�(y墨ng)鑳介€氶亷(gu貌)浜ゆ祦浼烘湇椹�(q奴)鍕�(d貌ng)鍣ㄥ(sh铆)鐝�(xi脿n)娌夌⿳骞崇Щ锛屾瘡娈垫枩鐜囨噳(y墨ng)鑳界崹(d煤)绔嬭(di脿o)绡€(ji茅)锛屽叾鐩搁棞(gu膩n)鎶€琛�(sh霉)鎸囨(bi膩o)鎳�(y墨ng)鑳藉湪瑷�(j矛)绠楁(j墨)灞忓箷涓婂嫊(d貌ng)鎱�(t脿i)椤ず;
 

銆€銆€——鍙嶆噳(y墨ng)绠℃帶鍒剁郴绲�(t菕ng):鎳�(y墨ng)鑳戒换鎰忚(di脿o)绡€(ji茅)锛岃搴︾簿纰哄埌1°;
 

銆€銆€——澹撳姏鎺у埗绯荤当(t菕ng):娣峰悎鑵旂殑澹撳姏鍙婂嚭姘ｇ澹撳姏鎳�(y墨ng)鑳介€氶亷(gu貌)瑾�(di脿o)绡€(ji茅)姘ф埃鐨勮(b菙)绲﹂噺鑷嫊(d貌ng)鎺у埗;
 

銆€銆€——闋�(y霉)鐔辩垚鐖愭韩鎺у埗鍙婂崌闄嶅嫊(d貌ng)浣滅郴绲�(t菕ng):鎳�(y墨ng)鑳藉皪(du矛)鐖愭韩閫�(j矛n)琛屽(sh铆)鏅�(sh铆)瑾�(di脿o)绡€(ji茅)锛屽苟鎳�(y墨ng)瀵�(sh铆)鐝�(xi脿n)闋�(y霉)鐔辩垚鐨勫崌闄�銆侀枊鍚堝嫊(d貌ng)浣滆姹�;
 

銆€銆€——鍐峰嵒姘磋矾鐩�(ji膩n)鎺х郴绲�(t菕ng):鎳�(y墨ng)鑳藉皪(du矛)鍐峰嵒姘磋矾閫�(j矛n)琛屽(sh铆)鏅�(sh铆)鐩�(ji膩n)鎺с€�
 

銆€銆€PCVD鐔旂府瑷�(sh猫)鍌欏強鎺у埗绯荤当(t菕ng)鍖呮嫭:
 

銆€銆€——涓绘帶鍒�:鎳�(y墨ng)瀵�(sh铆)鏅�(sh铆)鐩�(ji膩n)鎺ц蛋閫�銆佹棆杞�(zhu菐n)閫熷害銆佸鍔�銆佹祦閲忕瓑;
 

銆€銆€——娴侀噺鎺у埗:鎳�(y墨ng)鏍规摎(j霉)宸ヨ棟闇€姹傚皪(du矛)姘哀鐒扮殑鐏姏澶у皬閫�(j矛n)琛屾帶鍒�;
 

銆€銆€——鏃嬭綁(zhu菐n)鎺у埗:鎳�(y墨ng)閲囩敤浜ゆ祦浼烘湇绯荤当(t菕ng)淇濊瓑鏃嬭綁(zhu菐n)閬�(y霉n)鍕�(d貌ng)鍕婚€熼€�(j矛n)琛�;
 

銆€銆€——骞崇Щ鎺у埗:鎳�(y墨ng)鏍规摎(j霉)宸ヨ棟闇€姹傚(sh铆)鐝�(xi脿n)闆㈠悎鍒囨彌鐨勫揩鎱㈣蛋閫�锛屽苟鑳藉湪瑷�(j矛)绠楁(j墨)涓婂嫊(d貌ng)鎱�(t脿i)椤ず;
 

銆€銆€——澹撳姏鎺у埗绯荤当(t菕ng):鎳�(y墨ng)鍚屾檪(sh铆)鎺у埗閫�(j矛n)姘ｇ澹撳姏銆佸嚭姘ｇ澹撳姏銆佺伀鐒板ぇ灏�;
 

銆€銆€——鐔旂府瑷�(sh猫)鍌欑附鎺у埗:鎳�(y墨ng)瀵�(sh铆)鐝�(xi脿n)鍏ㄩ亷(gu貌)绋嬬殑鍏ㄨ嚜鍕�(d貌ng)鎺у埗銆�