? Gas mixing and blending
? Batch control
? Sensor driven leak testing
? Process monitoring
? Physical Vapor Deposition (Sputtering)
? 壓力監(jiān)控及控制
? 氣體比率控制
? 內(nèi)部閥門性能監(jiān)測(cè)
? 多報(bào)警信號(hào)設(shè)置
? 客戶自定義流量啟動(dòng)停止配置
? 氣體累計(jì)及可調(diào)脈沖輸出設(shè)置