系列 | X 軸 | Y 軸 | Z 軸 | 測頭系統(tǒng) | ||
LH54 | 500 | 600/1000 | 400 | +TP20 | +TP200 | +SP25 |
LH65 | 650 | 750/1200 | 500 | +TP20 | +TP200 | +SP25 |
LH87 | 800 | 1000/1500/2000 | 700 | +TP20 | +TP200 | +SP25 |
LH108 | 1000 | 1200/1600/2000/2500 | 800 | +TP20 | +TP200 | +SP25 |
LH1010 | 1000 | 1200/1600/2000/2500 | 1000 | +TP20 | +TP200 | +SP25 |
LH1210 | 1200 | 1600/2000/2500/3000 | 1000 | +TP20 | +TP200 | +SP25 |
LH1512 | 1500 | 2000/2500/3000/4000 | 1200/1300 | +TP20 | +TP200 | +SP25 |