平行平晶:是以光波干涉原理為基礎(chǔ),利用平晶的測(cè)量面與試件的被測(cè)量面之間所出現(xiàn)的干涉條紋來(lái)測(cè)量被測(cè)量面的誤差。平行平晶據(jù)有高精度的平面性和平行性。
平行平晶:用于檢定千分尺、杠桿千分尺、杠桿卡規(guī)和千分尺卡規(guī)等量具測(cè)量面的平面度和兩相對(duì)測(cè)量的平行度。
測(cè)量面上平面度偏差: <0.1μm
平面度局部偏差: >0.03μm
測(cè)量面平行度誤差: 組Ⅰ系列允差值:0.06μm
組Ⅱ、Ⅲ系列允差值:0.08μm
組Ⅳ系列允差值:0.1μm
組Ⅰ | 平行平晶 | 0-25mm | 4塊/組 |
組Ⅱ | 平行平晶 | 25-50mm | 4塊/組 |
組Ⅲ | 平行平晶 | 50-75mm | 4塊/組 |
組Ⅳ | 平行平晶 | 75-100mm | 4塊/組 |
組號(hào) | 0-25 | 25-50 | 50-75 | 75-100 |
1 | 15.00,15.12 15.25,15.39 | 40.00,40.12 40.25,40.37 | 65.00,65.12 65.25,65.37 | 90.00,90.12 90.25,90.37 |
2 | 15.12,15.25 15.37,15.50 | 40.12,40.25 40.37,40.50 | 65.12,65.25 65.37,65.50 | 90.12,90.25 90.37,90.50 |
3 | 15.25,15.37 15.50,15.62 | 40.25,40.37 40.50,40.62 | 65.25,65.37 65.50,65.62 | 90.25,90.37 90.50,90.62 |
4 | 15.37,15.50 15.62,15.75 | 40.37,40.50 40.62,40.75 | 65.37,65.50 65.62,65.75 | 90.37,90.50 90.62,90.75 |
5 | 15.50,15.62 15.75,15.87 | 40.50,40.62 40.75,40.87 | 65.50,65.62 65.75,65.87 | 90.50,90.62 90.75,90.87 |
6 | 15.62,15.75 15.87,16.00 | 40.62,40.75 40.87,41.00 | 65.62,65.75 65.87,66.00 | 90.62,90.75 90.87,91.00 |