主要特性與技術指標
直流和時間相關測量可讓您對電流-電壓（IV）測量結果充滿信心
4 象限電源和測量功能可讓您在低至 fA（毫微微安培）的范圍內進行精確的電流-電壓（IV）表征
測量范圍是 0.1 fA - 1 A / 0.5 µV - 200 V
提供點測量、掃描測量、脈沖和采樣測量功能
采樣測量間隔為 100 μs
脈寬最小值為 500 μs，使用 2 μs 分辨率
準靜態(tài)電容-電壓（QS-CV）測量，具有泄露電流補償
描述
在低至次 fA / µV 分辨率上執(zhí)行低電流/電壓測量，實現(xiàn)的直流測量性能
電源/測量單元（SMU）是 Keysight B1500A 半導體器件分析儀的關鍵測量模塊。SMU 集成了電壓/電流源和測量功能，可在低至 fA / µV 分辨率上執(zhí)行精確的直流電流-電壓（IV）測量。選件 ASU（自動傳感和開關單元）可將低電流測量性能向下擴展至次 fA 范圍，為您提供更高的測量性能。
SMU 還可執(zhí)行準靜態(tài)電容-電壓（QS-CV）測量。它不僅擁有低頻 CV 特征，同時還是表征柵極晶體管的表面態(tài)以及高頻 CV 的重要測量方法。Keysight B1500A 支持精確的 QS-CV 測量和泄露電流補償。
對于要求進行精密電壓/電流測量的半導體、納米器件（例如碳納米管（CNT）和碳納米線（CNW））、有源/無源元件、材料以及任意電氣器件，SMU 結合使用 EasyEXPERT 軟件的分析和數(shù)據(jù)管理能力，非常適合對這些器件進行表征。
Main features and technical indicators
Dc and time - dependent measurements give you confidence in current - voltage (IV) measurements
The 4 quadrant power supply and measurement capabilities allow you to perform accurate current-voltage (IV) characterization in a range as low as fA (nanoampere)
The measurement range is 0.1 fa-1 A / 0.5 v-200 V
Provides point measurement, scan measurement, pulse and sampling measurement functions
The minimum sampling interval is 100 s
The minimum pulse width is 500 s, using 2 s resolution
Quasi-static capacitance - voltage (QS-CV) measurement with leakage current compensation
describe
Perform low current/voltage measurements at as low as sub-fa/V resolution for optimal dc measurement performance
Power/measurement unit (SMU) is the key measurement module of Keysight B1500A semiconductor device analyzer. SMU integrates a voltage/current source and measurement function to perform accurate dc current-voltage (IV) measurements at a resolution as low as fA/V. Optional ASU (automatic sensing and switching unit) can extend the low current measurement performance down to the sub-fa range, providing you with higher measurement performance.
SMU can also perform quasi-static capacitance-voltage (qs-cv) measurements. It not only has the characteristics of low-frequency CV, but also is an important measurement method to characterize the surface state of gate transistor and high-frequency CV. Keysight B1500A supports accurate QS-CV measurements and leakage current compensation.
For semiconductors, nanodevices (such as CNT and CNW), active/passive components, materials, and any electrical device requiring precise voltage/current measurements, SMU, combined with the analytical and data management capabilities of EasyEXPERT software, is well suited for characterization of these devices.
