氣體 | 測量范圍 |
(HCN) | 0-50ppm |
酸性化合物(Acid Compounds) | 0 to 3 / 10 ppm |
氨氣/Amonia (NH3) | 0 to 100 / 300 / 1000 ppm |
三氯化硼/Boron Trichloride (BCl3) | 0 to 10 ppm |
一氧化碳/Carbon Monoxide (CO) | 0 to 100 / 300 / 1000 ppm |
氯氣 / Chlorine (Cl2) | 0 to 1 / 10 / 25 ppm |
/Diborane (B2H6) | 0 to 0.5 ppm |
/Hydride (PH3) | 0 to 0.3 / 1 / 10 ppm |
氫氣/Hydrogen (H2) | 0 to 1000 / 3000 ppm |
硫化氫/Hydrogen Sulfide (H2S) | 0 to 20 / 50 / 100 ppm |
聯(lián)氨/Hydrazine (N2H4) | 0 to 1 ppm |
二氧化氮/Nitrogen Dioxide (NO2) | 0 to 10 ppm |
一氧化氮/Nitrogen Monoxide (NO) | 0 to 50 ppm |
有機蒸氣/Organic Vapours | 0 to 50 / 100 / 200 ppm |
氧氣/Oxygen (O2) | 0 to 5 / 25 / 100 Vol% |
臭氧/Ozone (O3) | 0 to 0.5 ppm |
二氧化硫/Sulfur Dioxide (SO2) | 0 to 10 ppm |