YY-383/383S YAMATO晶圆切割冷却装置-仪表网

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YAMATO晶圆切割冷却装置

YAMATO晶圆切割冷却装置产品详情

ChillerforDicing Saw Machine

YY-383/383S

Model
YY-383	YY-383S
OperatingTemperature Range
4°Cto10°C	4°Cto20°C
Main Tank Capacity
100 L
Chemical Tank
40L × 3 Tanks	None

Equipment summary :

This Chiller issupplyingcoolingwater or chemical coolant for IC packagingDicingSawmachine.

YY-383 model have built inpHmeterａnd Filter system. pH meter makes easy to keep requiredpHrange withbuilt-in three chemical tanks operate from pHadjustmentswitch infront panel. Filter system removes cutting finedust.Also, thissystem is re-circulating system.
YY-383S model is drain system type which water supplyfromfacilityutility and cooling water out to Dicing Saw. Aftercuttingwatergoes to facility drain.

Feature :

pH control (By means of pH monitoringandbuilt-inthree chemical Tank)
Filter system
Stable output Temperature
Use R-407C Freon (ISO 14001 compliance)
Large capacity main Tank (100 L)
Automatic safetyoperationbyPLC

Back View

Main Tank	Three Chemical Tank for pH Control

Specifications

	YY-383	YY-383S
Configuration
Externalmaterial	Cold-rolledsteelsheet with melamine resin baked-painting
Painting color	YSCstandardcolor(DIC-G-61)
Temperaturerange	4°C to 10°C	4°C to10°C (dependonsupplywater temp.)
Temperaturecoolingtime	60 min (from25°Cto4°C)
Temperaturecontroller	Digitalsetting,digital indication (PID control)
Temperaturesensor	Pt 100
Refrigerator	1.5 kw	2.25 kw
Cooling unit	Stainlesssteelpipecooling unit
Refrigerant	R-407C(ISO140001compliance)
Pump	Immersiblepump
pHmeterandelectrode	Coolantconcentrationmeasurement	----
Float switch	Lead-typeliquidsurface switch
Pressure gauge	Pressuregaugewiththe contact switch
Integrationflow-meter	Digitaldisplayflowmeter
Water inlet	12 mmdia.tubeconnector (with hａnd valve and solenoid valve)
Coolantorwateroutlet	12 mmdia.tubeconnector
Coolantreturninlet	40 mm dia.tubeconnector	----
Drain	PVCpipefitting(with hａnd valve)
Main tank	PVC, 100 L
Filter	50 to 100 micronfilter(2Filter)	----
Chemicaltank(Threetanks)	PVC, 40 L (each tank)	----
Externaldimensions	W900×D1200×H1500mm
System
Type	Re-circulation	Drain
pH control	OK	None
Filter system	OK	None
ControlPanel
Pressure gauge	Analogpressuregauge with upper limit contact Pressure range : 0～1.0MPa Accuracy : ±1%
Temperaturecontroller	Digitalsetting,digital indication (PID control)
pHmeterandelectrode	Digitalsetting,digital indication
System control	ControlledbyProgrammable controller (PLC)
Timer	99hours59min(arbitrarily set)
Emergencystopswitch	Mushroomtypelockswitch
Lamps	Alarmlamps(Temperature, pH, Refrigerator, Pump)opening/stoplamps,Signal tower etc.
Safety
Over current	ProtectbyCircuitbreaker
pH condition	Upperlimitalarmcontact of pH controller with upper-limit contact isconnected,ａnd Lower limit alarm contact of pH controllerwithupper-limitcontact is connected.
Refrigerator	ProtectbyThermalrelay
Pump	ProtectbyThermalrelay and Level sensor
Hi pressure	Bypressuregaugeupper limit contact
Tank level low	ByTanklevelsensor
Shortcircuitbreaker	Shortcircuit/overcurrent has occurred, the power supply isturnedoff.
RequiredUtility
Power supply	AC200/220/380V,3-phase50/60Hz,5 KVA	AC200/220/380V,3-phase50/60Hz,7 KVA
Water supply	Fromfacility

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